It is quite safe, but only due to low-level-radiation digital X-rays on the scanners side and modern error-correction, fault-tolerance, sometimes chance on the users side. If you knock out a bit with X-Rays in a common picture-file today, you won't notice - one bit in four MByte-files will mostly be at a place where you'll never notice the difference.
Errors ARE introduced into flash and volatile ram, look for "soft error" if you want to know more, there are some papers.
If you're paranoid: backup your files on to something magnetic or off-site and then just move on. If not, nevertheless do backup the files. As for the camera - if it is affected (settings scrambled), just reset it as you would without knowledge about the source. Its firmware is in non-volatile PROM and much harder to change (read: safe).
PS: The wish for removing the electronics and putting them separately though the X-Ray really stems from a better view. I was asked several times to separate my bag full of gadgets, as they could not identify anything in my three layers of laptop, palmtop, camera, power supplies and batteries. Two times now they also have mistaken a part of my side-bag of the palmtop (Psion) for a knife :)