Assuming your sample images are of the camera's entire frame, then your spots are a bit larger and softer than typical dust on the front of the sensor stack would look at f/22. Check the rear element of your lens for dust or maybe even water condensation spots. If you don't find anything there, keep moving forward. The further forward you go in the lens, the less distinct the influence of dust and other surface defects will be. By the time you get to the lens' front element it takes a substantial amount of something to be very noticeable.
Roger Cicala, founder and lens guru at lensrentals.com, did a blog entry a while back that showed just how much "stuff" could be in the light path before it made much of a difference.